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Elastic properties measurement of glass layers fabricated on silicon wafers for microelectronics and micromachines : Thin films for acoustoelectronicsTSUKAHARA, Y; OHIRA, K; YANAKA, M.-A et al.IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 1995, Vol 42, Num 3, pp 387-391, issn 0885-3010Article

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